Zhouxun Microelectronics Launches AlN/AlScN Piezoelectric Thin-Film Process Module
As cutting-edge technologies—such as 5G communications, smart sensing, and medical imaging—undergo rapid evolution, the performance of MEMS chips is defining the boundaries of the user experience for smart devices. As a leader in the field of piezoelectric MEMS, Nanjing Zhouxun Microelectronics Technology Co., Ltd. has officially launched process modules for Aluminum Nitride (AlN) and Scandium-doped Aluminum Nitride (AlScN) piezoelectric thin films, providing a one-stop technical foundation for the R&D and mass production of high-end piezoelectric devices.
🧬 Dual-Technology Approach: Tailoring "Piezoelectric Cores" for Diverse Application Scenarios
Piezoelectric thin films serve as the "heart" of MEMS devices, with performance requirements varying significantly across different application scenarios. Zhouxun Microelectronics employs a parallel dual-technology strategy, offering customers flexible material selection options.
AlN Process Module: A Foundation for Stable, Reliable Mass Production
Pure AlN thin films are widely used in the MEMS sector due to their CMOS compatibility, low acoustic loss, and excellent thermal stability. Zhouxun has cultivated deep expertise in AlN processing; this module has been validated through large-scale mass production, achieving highly consistent thin-film deposition on 6-inch wafers and providing a robust foundation for devices such as acoustic sensors, RF filters, and ultrasonic transducers.
AlScN Process Module: An Engine for Breakthrough Performance
Scandium-doped aluminum nitride (AlScN) represents one of Zhouxun Microelectronics' core technologies. By precisely doping AlN with scandium, the material's piezoelectric performance achieves a dramatic leap forward. Compared to conventional AlN, AlScN thin films exhibit significantly enhanced piezoelectric responses, enabling substantial reductions in power consumption for the same driving force. This breakthrough allows devices to achieve wider operating bandwidths and higher sensitivity within smaller form factors, opening up new possibilities for cutting-edge applications such as high-performance ultrasonic imaging, high-precision inertial sensors, and low-power RF filters.
By running these two process modules in parallel, Zhouxun can flexibly recommend the optimal piezoelectric material solution based on the specific operating frequency, bandwidth requirements, and manufacturing costs of the customer's devices.
- Piezoelectric MEMS Process Platform -
Source: Zhouxun Microelectronics
To foster collaboration across the industry supply chain and drive technological innovation and application expansion, Aibang has established a WeChat group for the piezoelectric ceramic industry chain. We welcome companies from all segments of the supply chain to join; simply long-press the QR code below to join:
Recommended Event: 2026 Piezoelectric Ceramic Industry Forum (August 28, Hall 7, Shenzhen World Exhibition & Convention Center)
Proposed Topics:
Piezoelectric Ceramics Industry Forum (August 28, 2026, 10:00–12:00) | ||
No. | Proposed Topic | Invited Guests (Tentative) |
1 | R&D Progress on High-Performance Piezoelectric Ceramic Materials | Ganjiang Innovation Academy (CAS) & Institute of Physics (CAS) |
2 | Applications of Piezoelectric Ceramics in Consumer Electronics (Tentative) | Goertek Inc. |
3 | Applications of Piezoelectric Ceramics in Semiconductor Equipment | Harbin Institute of Technology, Shenzhen |
4 | Applications of Piezoelectric Ceramics in Ultrasonic Detection | Xi'an Technological University |
5 | Research on High-Dynamic Precision Drive and Control Technology for Piezoelectric Ceramics | Soochow University |
6 | Breakthroughs in Piezoelectric Ceramic Nanotechnology for the Semiconductor Sector | Piezoelectric Ceramic Enterprises |
7 | Endowing Robots with "Acute Tactile Sense": Piezoelectric Ceramic-Based Sensing and Interaction Technology | Piezoelectric Ceramic Enterprises |
8 | Current Status and Development Pathways of Lead-Free Piezoelectric Ceramic Materials | Piezoelectric Ceramic Enterprises / Universities |
9 | Analysis of the Global Piezoelectric Ceramics Market Size and Regional Competitive Landscape | Piezoelectric Ceramic Enterprises / Universities |
11 | Piezoelectric Ceramic-Based Nondestructive Testing and Medical Ultrasound Technology | Piezoelectric Ceramic Enterprises / Universities |
12 | Opportunities and Challenges for Piezoelectric Ceramic Sensors in the IoT Era | Piezoelectric Ceramic Enterprises / Universities |
For inquiries regarding further innovative speaking opportunities, please contact Ms. Li at 18823755657 (also her WeChat ID).
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Email: lirongrong@aibang.com
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